mems

from The Free On-line Dictionary of Computing (8 July 2008)

microelectromechanical system
MEMS

   <hardware> (MEMS) The integration of mechanical structures
   (moving parts) with microelectronics.  MEMS devices are
   "custom" designed for a purpose which requires a mechanical
   action to be controlled by a computer.

   Applications include sensors, medical devices, process
   controls.

   (http://mems.mcnc.org/).

   See also {nanotechnology}.

   (1999-03-25)