photolithography n 1: a planographic printing process using plates made from a photographic image
Photolithography \Pho`to*li*thog"ra*phy\, n. 1. The art or process of producing photolithographs. [1913 Webster] 2. The process by which the image of a pattern is transferred photographically to a sensitive surface, and the surface subsequently etched; used for printing or in the production of integrated circuits. [PJC] Photologic